한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제27권5호
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- Pages.273-284
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- 1994
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
폴리이미드에 스퍼터 증착된 Cu-Cr 합금박막의 열처리 거동
Thermal behavior of Cu-Cr Alloy Films sputter-deposited onto polyimide
초록
Thermal behavior of Cu-Cr thin alloy films has been investigated by SEM, AES, and TEM. Cu-Cr alloy films containing 3wt% Cr, 8wt% Cr have been sputter-deposited onto polyimide substrates and heat treated at
키워드