A study on the structure and properties of Cr and Cr$_2$O$_3$ films deposited by the vacuum evaporation method

진공 증발법으로 증착한 Cr, Cr$_2$O$_3$ 박막의 조직 및 특성에 관한 연구

The structure and properties such as adhesion and corrosion resistance of Cr and $Cr_2O_3$ films, deposited on steel plates by the vacuum evaporation method, were investigated. According to the ESCA and AES analy-sis, it could be concluded that chromium oxide with uniform composition could be formed on the steel sub-strate. The deposited Cr and $Cr_2O_3$ films had high adhesion strength, and they did not peeled off by the tape test. The adhesion property, however, was deteriorated as the film thciknes increased. After bending of the deposited specimen many cracks were observed by SEM, and they were assumed to have propagated along co-lumnar boundaries by the bending test. The corrosion resistance of the films was not generally good, which in-dicates that the films had a porous structure with a large number of defects such as pin holes and voids.