한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제27권1호
- /
- Pages.36-44
- /
- 1994
- /
- 1225-8024(pISSN)
- /
- 2288-8403(eISSN)
Arc Vapor Ion Deposition 법으로 제조된 TiN 피막의 내마모성에 관한 연구
A Study on Wear Resistance of TiN Films Prepared by Arc Vapor Ion Deposition Process
초록
The TiN films were deposited on the stainless substrates using arc vapor ion deposition process to in-vestigated the wear resistance. Pin-on-disc tests were performed to measure the volume wear loss of TiN films. The substrate bias voltages and nitrogen flow rates were selected as the deposition parameters of TiN films. It was found that the wear resistance of TiN films was enhanced with increasing bias voltages(0~-300 V) and nitrogen flow rates(220~380 SCCM). The volume wear loss TiN films were about 9.5~2.1
키워드