A Study on Trajectory Characteristics of the Six-Degrees-of-Freedom Fine Motion Mechanism for the Ultra Precision Positioning Decision

초정밀 위치결정을 위한 6자유도미동기구의 궤적 특성에 관한 연구

The purpose of this research is to examine precise linear motion and rotary motion. A six-degrees-of-freedom fine motion mechanism is introduced to drive an object precisely in directions of X, Y and Z-axes and around them : three rectangular linear motion and rotary ones. An experimental mechanism is introduced in which a $70$\times$70$\times$70$\times$(${mm}^3$) cube object is driven by six PZT actuator. The study is to establish the six-degrees-of-freedom fine motion mechanism of linear motion and rotary motion using PZT actuator.