Properties of Multilayer Glass-Ceramic Dielectrics

다층 글라스세라믹 유전체의 결정화특성에 관한 연구

  • 이헌수 (대구공업전문대학 요업과) ;
  • 손명모 (대구공업전문대학 요업과) ;
  • 박희찬 (부산대학교 무기재료공학과)
  • Published : 1994.09.01

Abstract

Crystallizable glasses with precipitation of celsian were prepared for the purpose of insulating dielectric layers for the devices such as integrated circuit substrates. Crystallization behavior of these glasses were studied by DTA, SEM, XRD analysis and by the measurement of dielectric properties. The base composition of the glass-ceramic consists in weight percent of 30% SiO2, 10% Al2O3, 26% BaO, 10% CaO, 10% ZnO, 8%TiO2 and 6% B2O3. 2-6 wt% Y2O3 were selected as the nucleating agent to promote monoclinic celsian formation. As a result, in barium-rich glasses containing 4~6wt% Y2O3 , monoclinic celsian was developed as major crystalline phase in the temperature range of 850~90$0^{\circ}C$. Also, the dielectric constant and quality factor of these glass-ceramics were about 9 and more than 1000, respectively.

Keywords

References

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