Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Effect of heat treatment on the crystal structure and element distribution of $PbTiO_3$ thin film prepared by sol-gel process

솔-젤법에 의해 제조된 $PbTiO_3$ 박막의 결정구조 및 성분분포에 미치는 열처리의 영향

  • Ki Cherl Ho (Dept. of Chemical Engineering, Korea Advanced Institute of Science and Technology, Taejon 305-701, Korea) ;
  • Do Hyun Kim (Dept. of Chemical Engineering, Korea Advanced Institute of Science and Technology, Taejon 305-701, Korea)
  • Published : 1994.12.01
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Abstract

Thin films of $PbTiO_3$ were deposited on bare silicon wafers by the sol-gel process. Heat treatment of films was executed at temperature range from $400^{\circ}C$ to $750^{\circ}C$ to investigated its effect on the crystal structure and element distribution of $PbTiO_3$films. Only the perovskite structure was observed in the films annealed at $440^{\circ}C$ but pyrochlore structure was partially found at temperature range from $480^{\circ}C to 550^{\circ}C$. Thin films annealed at temperatures higher than $600^{\circ}C$ showed only the perovskite structure again but also showed the increasing loss of lead.

솔-젤공정에 의하여 실리콘 웨이퍼 위에 형성한 $PbTiO_3$ 박막의 결정 구조 및 성분 분포에 미치는 열처리 효과를 고찰하기 위하여 $400^{\circ}C에서 750^{\circ}C$ 까지의 온도 범위에서 열처리를 수행하여 $440^{\circ}C$에서 열처리한 박막에서도 peroxskite 구조만을 갖는 박막이 형성됨을 새로이 발견하였다. $480^{\circ}C$에서 $550^{\circ}C$까지 열처리한 박막은 소량의 pyrochlore 구조가 함께 형성되 었으며 $600^{\circ}C$ 이상에서 열처리한 박막은 단지perovskite 구조만을 가졌으나 납의 승화가 급격 하게 증가하는 것이 관찰되었다.

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