초록
발진파장이 $1.3\mu\textrm{m}$인 Ridge Waveguide Distributed Feedback Laser Diode(RWG-DFB-LD)를 제작하고 특성을 평가하였다. 회절격자 형성은 광간섭무늬 노광법을 이용하였고 결정성장은 LPE로 수행하였다. 제작된 RWG-DFB-LD의 발진 임계전류는 67 mA이었고, 1296.5 nm 파장에서 측모우드 억제율 30 dB 이상으로 단일 종모우드 발진하였다. 금지대역폭 측정에 의한 회절격자 결합계수(k)는 $40cm^{-1}$로 평가되었다. 소신호 변조특성평가 펼과 제작한 RWG-DFB-LD는 1.2Ith에서 1.99GHz의 변조대역폭$(f_{-3dB})$ 특성을 보였다.
We fabricated and characterized RWG-DFB-LDs emitting at $1.3\mu\textrm{m}$ wavelength. For fabrication of the laser diode, inteference fringe of optical beams was used for grating formation and epi layers were grown by LPE. The fablicated RWG-DFB-LD operated in a single longitudinal mode with more than 30 dB SMSR at 1296.5 nm emitting wavelength and its threshold current was 67 mA. Coupling coefficient (K) was estimated as $40cm^{-1}$ by means of stop-band measurement. Finally, we show that the RWG-DFB-LD fabricated in this experiment can be applicable as light source of 2.5 Gbps optical communication system from the fact that the small signal response of the RWG-DFB-LD rated up to 1.99 GHz at pre-bias level of $1.2 I_{th}$..
