대한기계학회논문집 (Transactions of the Korean Society of Mechanical Engineers)
- 제18권1호
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- Pages.175-183
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- 1994
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- 1225-5963(pISSN)
DOI QR Code
열영동력이 수평 웨이퍼상의 입자침착에 미치는 영향
Thermophoretic Effect on Particle Deposition Toward a Horizontal Wafer
초록
To investigate thermophoretic effect on particle deposition, average deposition velocity toward a horizontal wafer surface in vertical airflow is measured keeping the wafer surface temperature different from the surrounding air temperature. In the present measurement, the temperature difference is maintained in the range from -10 to