분석과학 (Analytical Science and Technology)
- 제6권2호
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- Pages.239-246
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- 1993
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- 1225-0163(pISSN)
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- 2288-8985(eISSN)
Rf Magnetron Sputtering 방법에 의하여 제조된 $(BaSr)TiO_3$ 박막의 구조적, 광학적 특성 고찰
The Characterization of Structural and Optical Properties for rf Magnetron Sputtered $(BaSr)TiO_3$ Thin Film
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Kim, Tae-Song
(Department of Ceramic Science and Engineering, Korea Advanced Institute of Science and Technology) ;
- Oh, Myung-Hwan (Division of Applied Science and Engineering, Korea Institute of Science and Technology) ;
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Kim, Chong-Hee
(Department of Ceramic Science and Engineering, Korea Advanced Institute of Science and Technology)
- 투고 : 1993.04.10
- 발행 : 1993.05.25
초록
ITO coated glass, bare glass, 그리고 (100)Si 기판 위에 증착된
The structure of