Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 2 Issue 2
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- Pages.181-187
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- 1993
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- 1225-8822(pISSN)
Anodic Oxidation of Silicon in EPW Solution
EPW 용액에서의 실리콘 양극 산화막 형성에 관한 연구
- Bu, Jong-Uk (GoldStar Central Research Laboratory) ;
- Kim, Seon-Mi (GoldStar Central Research Laboratory) ;
- Kim, Seung-Hui (GoldStar Central Research Laboratory) ;
- Kim, Seong-Tae (GoldStar Central Research Laboratory) ;
- Gwon, Suk-In (Department of Metallurgical Engineering, Korea University)
- Published : 1993.06.01
Abstract
We have studied the anodic oxidation of silicon in the anisotropic etchant of EPW(Ethylenediamine, Pyrocatechol and Water) solution using the cyclic polarization technique. The samples have been characterized by means of X-ray photoelectron spectroscopy(XPS) and secondary ion mass spectrometry (SIMS). The results of cyclic polarization experiments show that the anodic oxides formed on p- and n-type silicon wafers break down at the same potential while breakdown does not occur up to open circuit potential in the case of
Si 이방성 에칭 용액인 EPW(Ethylenediamine, Pyrocatechol, Water) 용액내에서 potentiostat를 이용한 cyclic polarization 방법으로 양극 산화막의 연구를 수행하였다. p-Si 및 n-Si에서 양극 산화막의 breakdown potential은 동일한 값을 보였으며,
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