한국진공학회지 (Journal of the Korean Vacuum Society)

한국진공학회 (The Korean Vacuum Society)
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$10^{-10}$ torr까지의 초고진공 표준 확립

Establishment of Ultrahigh Vacuum Standard down to $10^{-10}$ torr Range

  • 홍승수 (한국표준과학연구원 진공연구실) ;
  • 임재영 (한국표준과학연구원 진공연구실) ;
  • 박재홍 (한국표준과학연구원 진공연구실) ;
  • 신용현 (한국표준과학연구원 진공연구실) ;
  • 이철로 (한국표준과학연구원 진공연구실) ;
  • 정광화 (한국표준과학연구원 진공연구실)
  • Hong, Seung-Su (Korea Research Institute of Standards and Science, Vacuum Laboratory) ;
  • Im, Jae-Yeong (Korea Research Institute of Standards and Science, Vacuum Laboratory) ;
  • Park, Jae-Hong (Korea Research Institute of Standards and Science, Vacuum Laboratory) ;
  • Sin, Yong-Hyeon (Korea Research Institute of Standards and Science, Vacuum Laboratory) ;
  • Lee, Cheol-Ro (Korea Research Institute of Standards and Science, Vacuum Laboratory) ;
  • Jeong, Gwang-Hwa (Korea Research Institute of Standards and Science, Vacuum Laboratory)
  • 발행 : 1993.06.01
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초록

동적교정방법을 이용하여 $10^{-7}~10^{-10}$torr 영역에서 교정 가능한 초고진공 표준기를 제작하였다. $10^{-6}~10^{-9}$torr L/s 영역의 극미세 유량은 고진공 표준기에 porous plug를 연결하여 발생 제어시켰으며 일정한 배기속도를 유지함이 알려져 있는 refrigerator type cryopump를 이용하여 $3{\times}10^{-11}$torr의 base pressure를 얻을 수 있었다. 이 초고진공 표준기를 이용하여 두 개의 extractor gauge와 자체 제작한 nude 이온게이지들을 교정하고 그 직선성 및 재현도를 살펴보았다.

The dynamic calibration system which can calibrate the ultrahigh vacuum pressure down to $10^{-10}$torr has been fabricated. The production and control of minute flow of $10^{-6}~10^{-9}$torr L/s range is done by a porous plug connected to the high vacuum standards system. The base pressure of the UHV standards system down to $10^{-11}$torr range was obtained by refrigerator type cryopump, whose pumping speed is known to be constant. By using the UHV standards system, 2 extractor gauges and 1 nude ion gauge were calibrated and their linearities and scatterings were studied.

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