Bulletin of the Korean Chemical Society

  • 제14권2호
  • /
  • Pages.163-164
  • /
  • 1993
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  • 0253-2964(pISSN)
  • /
  • 1229-5949(eISSN)
대한화학회 (Korean Chemical Society)
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Preparation of Aluminum Nitride Thin Films Using Single Precursor OMCVD

  • Park, Joon T. (Department of Chemistry, Korea Advanced Institute of Science and Technology) ;
  • Lee, June-Key (Department of Chemistry, Korea Advanced Institute of Science and Technology) ;
  • Kim, Se-Hun (Department of Chemistry, Korea Advanced Institute of Science and Technology) ;
  • Sung, Myung-Mo (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Kim, Yun-Soo (Advanced Materials Division, Korea Research Institute of Chemical Technology)
  • 발행 : 1993.04.20
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참고문헌

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피인용 문헌

  1. Geometries and Relative Stabilities of AlN Four-Membered-Ring Compound Isomers: Ab initio Study vol.23, pp.2, 1993, https://doi.org/10.5012/bkcs.2002.23.2.241
  2. Selective Vapor-Phase Deposition of Conductive Poly(3,4-ethylenedioxythiophene) Thin Films on Patterned FeCl3 Formed by Microcontact Printing vol.27, pp.10, 1993, https://doi.org/10.5012/bkcs.2006.27.10.1633