Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 26 Issue 2
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- Pages.71-81
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- 1993
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
The effects of plasma treatment of polyimide surface on the adhesion of chromium/polyimide
크롬/폴리이미드의 접착력에 미치는 폴리이미드 표면의 플라즈마 처리의 효과
- Chung, Tae-Gyeong (Dept. of Electronic Materials Engineering, KAIST) ;
- Kim, Young-Ho (Dept. of Materials Engineering, Hanyang University) ;
- Yu, Jin (Dept. of Electronic Materials Engineering, KAIST)
- Published : 1993.04.01
Abstract
Thed effects of Ar or Oxygen RF plasma treatment on the adhesion behavior of Cr films to polyimide sub-strates have been investigated by using SEM, XRD, AES, and
Keywords