한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)
- 제10권4호
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- Pages.104-108
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- 1993
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- 1225-9071(pISSN)
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- 2287-8769(eISSN)
선형측정장치 개발
Development of linear measuring system
- 엄태봉 (한국표준과학연구원 길이연구실) ;
- 김구영 (한국표준과학연구원 공작실) ;
- 정명세 (한국표준과학연구원 역학연구부)
- Eom, Tae-Bong ;
- Kim, Goo-Young ;
- Chung, Myung-Sai
- 발행 : 1993.12.01
초록
The linear length measurements are most frequently performed and should be most accurate among other parts in dimensional metrology. We developed the linear measuring system using a laser interferometer to improve the accuracy and to shorten the calibration time. The uncertainty of the system is 0.01 .mu. for 500mm steel gage block. The range of the measurement and resolution of the system are 1000mm and 0.01 .mu. m, respectively.