한국재료학회지 (Korean Journal of Materials Research)

  • 제3권5호
  • /
  • Pages.451-458
  • /
  • 1993
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  • 1225-0562(pISSN)
  • /
  • 2287-7258(eISSN)
한국재료학회 (Materials Research Society of Korea)
권호 표지

플라즈마 화학증착된 TiN박막의 마모특성

Wear Behavior of TiN Coatings Deposited by Plasma Assisted Chemical Vapor Deposition

  • 인치범 (한국과학기술원 전자재료공학과) ;
  • 천성순 (한국과학기술원 전자재료공학과)
  • In, Chi-Beom (Dept. of Materials Engineering, Korea Advanced Institute of Science and Technology) ;
  • Cheon, Seong-Sun (Dept. of Materials Engineering, Korea Advanced Institute of Science and Technology)
  • 발행 : 1993.10.01
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초록

베아링강(AISI S2100) 위에 TiCi/sub 4/, N/sub 2/,H/sub 2/,그리고 Ar의 기체혼합계를 이용하여 플라즈마화학증착법으로 내마모 TiN증착층을 얻었다. 증착된 TiN층 내의 잔류 CI에 의한 결정성, 미소경도, 접착력, 그리고 마모특성에 대해 연구하였다. TiN 중착층은 좋은 내마모성을 가지고 있었으며, TiN의 기계적 특성은 잔류CI함량이 증가할때 나빠졌다. 마모측정결과 마모면의 trailing edge에 인장응력이 걸려 많은 crack이 관찰되엇다.

Wear resistant titanium nirridc(TiN) coatings Were depositecd onto bearing stcel(AISI 52100) by plasma assisted chemical vapor deposition using the gaseous mixtyre of $TiCI_4, N_2, H_2$ and Ar. The In- fluences of the choorine on the crystallinity, microhardness, adhesion. Wear. property of coatings were studied. It was found that the TiN coatings had an outstanding resistance to wear but the mechanical properties of the coatings deteriorated with the increase in the chlorine content. From wear test, many cracks in the trailing edge which was under tensile stress was investigated.

키워드

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