참고문헌
- J Vac. Sci. Technol A v.10 no.4 Integration of Ferroelectrics Thin Films into Nonvolatile Memories S. Sinharoy;H. Buhay;D.R. Lampe;M.H. Francombe
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control v.38 no.6 Electrical and Reliability Properties of PZT Thin Films for ULSI DRAM applications J. Carrano;C. Sudhama;V. Chikarmane;J. Lee;A. Tasch;W. Shepherd;N. Abt
- Ferroelectrics v.108 Effect of Substrate on the Surface Acoustic Wave Transduction on PZT Thin Films R Srivastava;A. Mansingh
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control v.38 no.4 Optical Information Storage and Charge Traps in PZT Thin Films M. Ivey;S. Mancha;R. Carter
- J. Vac. Sci. Technol. A v.9 no.3 Ferroelectric Thin Films for Electronic Applications G.H. Haertling
- J. Vac. Sci. Technol. A v.10 no.1 Ferroelectric Lead Zirconate Titanate Thin Films by Radio Frequency Magnetron Sputtering E.S. Ramarkrishnan;W.Y. Howng
- Ceramic Transactions v.25 Deposition and Characterization of Thin Film Ferroelectric PZT Phases by Plasma Assisted CVD D.A. Richaradson;C.J. Kuo;S.K. Dey;W.T. Petuskey
- Ferroelectrics v.116 Processing-structure Relations for Ferroelectricic Thin Films Deposited by Ion Beam Sputter Deposition A Kingon;M. Ameen;O. Auciello;K. Gifford;H. Alshareef;T. Graettinger;S.H. Rou;R. Hren
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Ferroelectrics
v.116
Pulsed Laser Deposition of Oriented
$PbZr_{0.54}Ti_{0.46}O_3$ K.S. Grabowski;J.S. Horwitz;D.B. Chisey - Ferroelectrics v.112 Process Optimization and Characterization of Device Worthy Sol-Gel Based PZT for Ferroelectric Memories B.M. Melnick;J.D. Cuchiaro;L.D. Mcmillian;C.A. Paz de Arauujo;J.F. Scott
- MRS Symposium Proceedings v.200 Characteristics and Metal/PZT/p-Si MIS Capacitions T.S. Kalkur;G. Argos;L. Kammerdiner
- MRS Symposium Proceedings v.200 Study of Diffusion Barriers for PZT Deposited on Si for Non-Volatile Random-Acess Memory Technology N.R. Parikh;J.T. Stephen;M.L. Swanson;E.R. Myers