Characteristics of Se/CdS Heterojunction Fabricated by EBE Method

EBE법으로 제작한 Se/CdS 이종접합의 특성

CdS and Se thin films were deposited on slide glass by EBE method respectively and surface morphology, crystal structure, electrical and optical properties were investigated by substrate temperature and annealing. The deposited CdS film was well fabricated with cubic structure at substrate temperature of $150^{\circ}C$. Se film was deposited with noncrystal structure until substrate temperature of $100^{\circ}C$, but Se film was grown with monoclinic structure at substrate temperature of $150^{\circ}C$. And so, after annealing at $150^{\circ}C$ for 15min, noncrystalline Se was proved to be hexagonal structure. Finally, the maximum output of Se/CdS heterojunction at 5000 lux was 4 $mW/cm^{2}$ and maximum spectral sensitivity was represented at 585nm.

EBE법으로 슬라이드 유리기판 위에 CdS와 Se박막을 각각 증착하고 기판온도 및 열처리에 따른 표면상태, 결정구조, 전기적 및 광학적 특성을 분석하여 최적 제작조건을 찾았다. CdS는 기판온도 $150^{\circ}C$에서 입방정계로 가장 잘 성장되었으며 Se은 기판온도 $100^{\circ}C$까지 비정질을 나타내었으나 기판온도 $150^{\circ}C$일때는 단사정계로 결정성장되었다. 또한 비정질 Se을 온도 $150^{\circ}C$로 15분간 열처리하여 줌으로써 육방정계 결정 구조를 얻을 수 있었다. 최종적으로, 제작한 Se/CdS 이종접합에서 최대출력은 5000 lux일때 4 $mW/cm^{2}$이었으며 최대 분광감도는 585 nm에서 나타났다.