연구논문집

Korea Institute of Machinery & Materials (한국기계연구원)
권호 표지

A Study on the By-Pass Type Mass Flow Controller

분류세관식 유량제어장치의 설계에 관한 연구

  • 최태민 (한국기계연구원 열유체기계실)
  • Published : 1992.12.31
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Abstract

A mass flow controller(MFC) is commonly used in the semiconductor industries to control the flow rate of various process gases. The measurement and precise control of the of flow rate the gas are the key for a succesful IC fabrication. To eventually design a reliable MFC, a pre-proto type MFC was built and its flow characteristics were investigated. Most of the functional components of the pre-proto type were built for the present study, but the remainder were adopted from a commercial unit. The flow control characteristics were compared with that of a standard MFC. Major dimensions of an MFC for 0-10 SLM capacity were suggested.

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