Abstract
Multilayer coatings of $WO_3$ were deposited by the sol-gel technique on microscope slide glass and ITO coated glass. These films were characterized optically, chemically, and structurally by XRD, spectro-photometry, DTA/TGA, SEM/EDAX and RBS. Uniform $WO_3$ sol-gel films were dip coated on slide glass at dipping speed of 5mm/s. This sample indicated a low near IR transmittance in optical properties as a result of coloration using a dilute HCI electrolyte as the $H^+$ion sources. Differential thermal analysis results have allowed the accurate determination of the formation temperature of the $WO_3$ crystalline phase from the gel data in the range of $380^{\circ}C{\sim}500^{\circ}C$, consistent with crystallization temperature of sol-gel film. RBS spectrometry was performed on the uncolored $WO_3$ sol-gel film, yielding a chemical composition of $WO_3$.
졸-겔 기술에 의해 $WO_3$ 다충박막이 유리와 ITO coated glass 위에 증착되었다. 특성은 XRD, 분광광도계, DTA/TGA, SEM/EDAX 그리고 RBS에 의해서 분석되었다. 균질한 $WO_3$막은 유리기판위에 dipping속도 5mm/s에서 증착 되었으며 이 시료는 희석된 HCI 전해액을 사용하여 착색시킨 결과 낮은 근적외선 투과율을 나타내었다. DTA 결과 $380^{\circ}C{\sim}500^{\circ}C$ 범위의 gel data는 $WO_3$의 결정화 온도 형성을 결정하였으며 이 측정치는 졸-겔 박막의 결정화 온도와 일치하였다. RBS에 의해 착색되지 않은 $WO_3$ 졸-겔 막의 화학조성은 $WO_3$였다.
