열처리공학회지 (Journal of the Korean Society for Heat Treatment)
- 제5권1호
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- Pages.1-12
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- 1992
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- 1225-1070(pISSN)
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- 2508-4046(eISSN)
Titanium Interlayer가 TiN 박막의 밀착특성에 미치는 영향
The Effect of Titanium Interlayer on the Adhesion Properties of TiN Coating
- Kong, S.H. (Department of Metallurgical Engineering, Yonsei University) ;
- Kim, H.W. (Department of Mechanical Engineering, Dankook University) ;
- Shin, Y.S. (Saeil Heavy Industrial Co.) ;
- Kim, M.I. (Department of Metallurgical Engineering, Yonsei University)
- 발행 : 1992.03.31
초록
In order to improve adhesive force of TiN film, we sputtered titanium as interlayer before TiN deposition by Plasma Enhanced Chemical Vapour Deposition. We observed changes of hardness and adhesion at a various thickness of titanium interlayer and also examined analysis. At the critical thickness of the titanium interlayer(about
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