Journal of the Korean Society for Heat Treatment (열처리공학회지)
- Volume 5 Issue 1
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- Pages.1-12
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- 1992
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- 1225-1070(pISSN)
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- 2508-4046(eISSN)
The Effect of Titanium Interlayer on the Adhesion Properties of TiN Coating
Titanium Interlayer가 TiN 박막의 밀착특성에 미치는 영향
- Kong, S.H. (Department of Metallurgical Engineering, Yonsei University) ;
- Kim, H.W. (Department of Mechanical Engineering, Dankook University) ;
- Shin, Y.S. (Saeil Heavy Industrial Co.) ;
- Kim, M.I. (Department of Metallurgical Engineering, Yonsei University)
- Published : 1992.03.31
Abstract
In order to improve adhesive force of TiN film, we sputtered titanium as interlayer before TiN deposition by Plasma Enhanced Chemical Vapour Deposition. We observed changes of hardness and adhesion at a various thickness of titanium interlayer and also examined analysis. At the critical thickness of the titanium interlayer(about
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