한국재료학회지 (Korean Journal of Materials Research)
- 제2권5호
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- Pages.360-365
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- 1992
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- 1225-0562(pISSN)
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- 2287-7258(eISSN)
RF Sputter 방법으로 제조한 투명전도막 ZnO 특성
Properties of Transparent Conducting Zinc Oxide Films Prepared by RF Sputtering
- 최병호 (금오공과대학 재료공학과)
- Choe, Byung-Ho (Department of Materials Science and Engineering, Kumoh National Institute of Technology)
- 발행 : 1992.10.01
초록
Ga 첨가효과 및 Sputter 제조조건이 전기적 특성에 미치는 영향을 고찰하기 위해 ZnO분말과 G
Ga-doped polycrystalline ZnO films on glass substrates were prepared by sputtering the targets, which had been prepared by sintering discs consisting of ZnO powder and various amounts of G
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