전자공학회논문지A (Journal of the Korean Institute of Telematics and Electronics A)
- 제29A권7호
- /
- Pages.73-81
- /
- 1992
- /
- 1016-135X(pISSN)
열처리에 따른 TiN/Ti/Si 구조의 열적반응 및 산소원자의 거동에 관한 연구
The Thermal Reaction and Oxygen Behavior in the Annealed TiN/Ti/Si Structures
초록
We have investigated the thermal reaction property and the oxygen behavior of TiN/Ti/Si structure after different hear treatments using x-ray photoelectron spectroscopy and cross-sectional transmission electron microscopy measurements. During the heat treatment in N
키워드