집적회로상의 선간 정전용량 계산을 위한 시뮬레이션에 관한 연구

A Study on the Simulation of Interconnection Capacitance Calculation for VLSI

In this paper, a method for the calculation of 2-dimensional interconnection capacitance for a multi-interconnection signal line in a dielectric region is presented. The numbers of dielectric layers and signal lines are arbitrary. To calculate the capacitance parameter, Boundary Element Method is used, and the dielectric interface and the surface of lines are divided into subsections. The advantages of BEM are small CPU-time and more exact solution due to the directly calculated values of capacitance only at the boundary of domain.It is adopted that the surface capacitance of each subsection assumed constant. The solution of surface charge density and capacitance parameter are calculated in a given domain.