한국진공학회지 (Journal of the Korean Vacuum Society)
- 제1권1호
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- Pages.100-105
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- 1992
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- 1225-8822(pISSN)
AES/XPS를 이용한 Au/V, Au/Ti 박막의 표면산화물 분석
Characterization of Surface Oxides in Gold Thin Films with V- and Ti- underlays by AES and XPS
초록
Au/V, Au/Ti의 이중구조 박막을 대기 중에서
Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) analyses have been performed on double-structured Au/V and Au/Ti thin films after heat treatment at 500
키워드