Beaming Effect를 고려한 Tube 연결부의 Conductance 계산

Effect of Gas Beaming in the Calculation of Tube Conductance

Conductance calculation is essential in designing a vacuum system. Since mathematical solution is nearly impossible except for a few simple cases, it has been so usual to calculate the conductance for a series connection of components using an approximate formula by Oatley. However, Oatley's formula has a fundamental flaw of totally neglecting the effect of gas beaming. In this study, a new technique is suggested for calculating the conductance with the same accuracy as the Monte Carlo method but with much less computing time, and applied to a system of tube connections in series. The effects of gas beaming in the calculation of conductance is analyzed quantitatively by comparing the conductance calculated by this method with those from Oatley's formula.