한국진공학회지 (Journal of the Korean Vacuum Society)
- 제1권1호
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- Pages.1-10
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- 1992
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- 1225-8822(pISSN)
스테인레스 강의 진공특성에 대한 화학세척의 효과
Effect of Chemical Cleaning on Vacuum Properties of a Stainless Steel Surface
초록
Three chemical precleaning methods-degreasing, electropolishing and acidic etching-suitable for stainless steel vacuum chamber have been studied and compared. The techniques used in evaluating and comparing the three treatments include Auger analysis and the measurement of the outgassing rate. The obtained outgassing rates (N2 equivalent) are 1.1
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