Journal of the Korean Magnetics Society (한국자기학회지)
- Volume 2 Issue 2
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- Pages.119-124
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- 1992
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- 1598-5385(pISSN)
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- 2233-6648(eISSN)
Effects of Sputtering Ar Pressure on Magnetic and Magneto-optical Propwrties in Compositionally Modulated Co/Pd Supwrlattice Thin Films
조성변조 Co/Pd 초격자 박막의 Ar가스 압력변화에 따른 자기 및 자기광학적 특성
Abstract
We have investigated the effects of sputtering Ar gas pressure on magnetic and magneto-optical properties in compositionally modulated Co/Pd superlattice thin films. The samples were prepared by dc magnetron sputtering from 2-in.-diam Co and Pd targets by alternately exposing the substrates to targets. Sputtering Ar gas pressure was varied from 2 to 30 mTorr. All samples had same bilayer thicknesses composed of 2-
조성변조 Co/Pd 초격자 박막 제조시 스퍼터링 Ar기압이 박막의 미세조직에 미치는 방향과 이로 인한 자기 및 자기광학적 특성에 미치는 영향을 조사하였다. 초격자 박막은 dc-magnetron 스퍼터링 방법으로 각 sublayer의 두께가
Keywords