Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
권호 표지

Determination Of Optical Constants and Thickness of Weakly Absorbing Thin Films Using An Envelope Method

포락선 방법을 이용한 흡수가 작은 박막의 광학 상수 및 두께 결정

  • 황보창권 (인하대학교 이과대학 물리학과) ;
  • 진권휘 (인하대학교 이과대학 물리학과) ;
  • 박대윤 (인하대학교 이과대학 물리학과) ;
  • 이민희 (인하대학교 이과대학 물리학과)
  • Published : 1992.03.01
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Abstract

A simple formula of the envelope method, which uses two envelopes fitted to the transmittance at quarter- and half-wave optical thicknesses, is derived to determine the optical constants (refractive index and extinction coefficient) and the thickness of weakly absorbing thin films. We applied the envelope method to ZnS and SiOx films deposited in a vacuum chamber and determined the optical constants at different deposition conditions. For SiOx films, the decrease in refractive index is consistent with the increase in stoichiometry as the backfilled oxygen pressure increases.

분광 광도계에서 측정한 1/4 파장과 1/2 파장 광학 두께에서의 투과율을 곡선 맞춤한 두 포락선으로부터 흡수가 작은 박막의 광학 상수(굴절률과 소명 계수)와 두께를 결정하는 포락선 방법의 간단한 식을 유도하였다. 기판의 뒷면 효과를 고려한 포락선 방법을 진공 증착한 ZnS와 SiOx박막에 적용하여 증착조건에 대한 광학 상수의 변화를 결정하였으며, SiOx박막의 경우 주입 산소 압력의 증가에 따른 굴절률의 감소와 원소 조성비의 증가가 일치하는 것을 확인하였다.

Keywords

References

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