전자공학회논문지A (Journal of the Korean Institute of Telematics and Electronics A)
- 제28A권11호
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- Pages.894-901
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- 1991
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- 1016-135X(pISSN)
밀착형 선형 영상감지소자를 위한 a-Si:H막의 특성
Characteristics of a-Si:H Films for Contact-type Linear Image Sensor
초록
Contact-type linear image sensors have been fabricated by means of RF glow discharge decomposition method of silane and hydrogen mixtures. The dependences of the electrical and optical properties of these sensor on thickness, RF power, substrate temperature and ambient gas pressure have been investigated. the ITO/i-a-Si:H/Al structure film shows photosensitivity of 0.85 and photocurrent to dark current ratio (
키워드