한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제24권1호
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- Pages.25-30
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- 1991
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
저항가열원에 의한 물질의 증발특성(I)
Evaporation characteristics of materials from resistive heating sources(I)
- 정재인 (산업과학기술연구소 기초과학연구분야, 산업과학기술연구소 고기능 표면처리 Project Team) ;
- 임병문 (산업과학기술연구소 고기능 표면처리 Project Team) ;
- 문종호 (산업과학기술연구소 기초과학연구분야, 산업과학기술연구소 고기능 표면처리 Project Team) ;
- 홍재화 (산업과학기술연구소 기초과학연구분야, 산업과학기술연구소 고기능 표면처리 Project Team) ;
- 강정수 (산업과학기술연구소 기초과학연구분야, 산업과학기술연구소 고기능 표면처리 Project Team) ;
- 이영백 (산업과학기술연구소 기초과학연구분야, 산업과학기술연구소 고기능 표면처리 Project Team)
- 발행 : 1991.03.01
초록
The evaporation characteristics of Ag, Al, Au, Cr. Cu, In, Mg, Mn, Pb, Pd, Si, SiO, Sn, Ti and Zn with the various resistive heating sources have been studied. The employed sources are refractory metal (Mo, Ta and W) boats, W-wire, ceramic (usually Al2O3)-coated and -barriered refractory metal boats, and special boats such as baffled boats and intermetallic boats (nitride compound and graphite). We investigated the melting mode, evaporation rate at a specific power, and lifetime of the sources. A special boat holder is also discussed which is needed to cool the sources at a large heat capacity.
키워드