Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Relationship Between Voltage-time Characteristics and Microstructures of Tantalum Oxide Thin Films Prepared by Anodic Oxidation

양극 산화법으로 제조된 Tantalum Oxide 박막의 전압-시간 특성과 미세구조와의 연관성

  • 정형진 (한국과학기술원 세라믹스부) ;
  • 윤상옥 (강릉대학교 재료공학과) ;
  • 이동헌 (한국과학기술원 세라믹스부)
  • Published : 1991.06.01
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Abstract

Microstructures of tantalum oxide, anodic-oxidized in oxalic acid, are shown to be related to voltage-time characteristics during formation reaction. It is observed that a crystalline phase transformed from an amorphous phase is recrystallized in the presence of the high electric field within the film, and this recrystallized film has a very porous microstructure. From the results of the XRD, the nonlinearity observed after the first spark voltage is recognized to be due to the local crystallization.

Keywords

References

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