초록
P층의 정공농도를 높이기 위하여 ${\delta}$-doped P층을 갖는 새로 구상된 a-Si 태양전지를 제작하였다. ${\delta}$-doped P층은 0.1-0.5 원자층의 박막 B층과 undoped a-Si의 여러층으로 구성되어 있다. B층은 광 CVD법과 열분해기법으로 증착시켰다. ${\delta}$-doped P층 박막에 대한 구조적, 광학적 및 전기적 특성을 FTIR, AES, SIMS등을 이용하여 평가하였다. 이 연구의 결과로서는 ${\delta}$-doped P층을 갖는 태양전지에 대하여 12.5%의 에너지변환효율을 달성하였다.
Novel a-Si solar cells with delta-doped(${\delta}x$-doped) P-layer have been fabricated to enhance the hole concentration of the P-layers. The ${\delta}-$doped P-layer consists of very thin B sheets of 0.1-0.5 atomic layers and undoped a-SiC multi-layers. B-layers were prepared by photo-CVD and pyrolysis technique. The structural, optical and electrical characteristics of the delta-doped P-layer films were evaluated by means of FTIR, AES and SIMS. As the results of this study, it was found that the ${\delta}$-doped P-layer showed much superior optical and electrical characteristics than those of conventional uniformly B-doped a-Si layers. 12.5% energy conversion efficiency was achieved for the Cell with ${\delta}$-doped P-layer.