SEM, X선 마이크로 분석기, TEM에 의한 코디에라이트의 특성 연구

Characterization of Cordierite by SEM, Microanalysis X and TEM

The cordierite (MgO, SiO2, Al2O3) is of great interest for microelectronic packaging of integrated circuits. Its main advantages are low dielectric constant and low thermal expansion. The cordierite precursor is obtained by sol-gel synthesis using organic and inorganic compounds. The obtained cordierite precursor is an amorphous state at about 900\ulcorner. Green and fired cordierite samples were studied by SEM. Microanalysis X and TEM for microscopic properties. The fired cordierite shows forte diminution of Mg in comparison with its value at volume and the deficit of Mg compensates by sugmentation of Al and Si \ulcornercordierite and \ulcornercordierite are present near the surface (< 100) and small quantities of magnesium aluminate (MgAl2O4)is presented spinnel phase.