클린 터널형 클린룸 설계를 위한 유동특성의 실험적 연구

An Experimental Study on the Airflow Characteristics for Clean Tunnel Type Clean Room Design

  • 배귀남 (한국과학기술원 기계공학 연구부) ;
  • 임학규 (한국과학기술원 기계공학 연구부) ;
  • 오명도 (한국과학기술원 기계공학 연구부)
  • 발행 : 1989.02.01

초록

The airflow characteristics of clean tunnel type clean room were experimentally investigated with the change of operating speed and exit type. Distributions of air velocity and pressure were measured in clean room which is located lower than HEPA filters, and the pressure distribution was also measured in upper plenum which is located above the HEPA filters, to identify the performance of clean room. Through the analysis it was turned out that air velocity characteristics in clean room were significantly affected by the upper plenum flow conditions such as pressure distribuion. This results will be useful in the actual clean room design to enhance the performance.

키워드

과제정보

연구 과제 주관 기관 : 과학기술처