An Experimental Study on the Airflow Characteristics for Clean Tunnel Type Clean Room Design

클린 터널형 클린룸 설계를 위한 유동특성의 실험적 연구

The airflow characteristics of clean tunnel type clean room were experimentally investigated with the change of operating speed and exit type. Distributions of air velocity and pressure were measured in clean room which is located lower than HEPA filters, and the pressure distribution was also measured in upper plenum which is located above the HEPA filters, to identify the performance of clean room. Through the analysis it was turned out that air velocity characteristics in clean room were significantly affected by the upper plenum flow conditions such as pressure distribuion. This results will be useful in the actual clean room design to enhance the performance.