Speckle Interferometry and Automatic Fringe Analysis for Small Displacement Measurement

미세변위 측정을 위한 스펙클 간섭계의 구성과 자동 Fringe 해석

Dual field speckle interferometry that is sensitive to the surface displacement of the object is constructed, and fringe patterns that have the displacement-informations are analysed using digital image processing. From 10\ulcorner to 80\ulcorner with respect to each specklegrams are obtained by double-exposure techniques, which are analysed by the proposed system and algorithm. Up to 10\ulcorner displacement, near measurable lower bound of Speckle Interferometry, fringe visibility is decreased due to decreasing fringe density, therefore relative errors are produced over 10% but over that displacement, relative errors are produced below 5%. Particularly, it is observed that spatial frequencies of each displacement are comparatively linear.