$Ti:LiNbO_3$ 광도파로를 이용한 전기광학 격자형 변조기 제작

Fabrication of Electro-Optic Grating Modulator Using $Ti:LiNbO_3$ Optical Waveguide

In this study, a planar waveguide has been fabricated on a Y-cut LiNbO3 substrate by the Ti indiffusion technique and its guiding characteristics are measured by bright M-line spectroscopy. Using the photolithography method, an electro-optic grating modulator with interdigital electrodes has been fabricated by depositing Al on the Ti:LiNbO3 planar waveguide. And the beam intensity diffracted by the grating is measured as the applied voltage is increased.