A Study on the Influence of the Standard Filter and Phase-Corrected Filter for the Surface Roughness Measurement on the Value of Surface Roughness

표면거칠기 측정용 표준필터와 위상보상형 필터의 위상특성이 표면거칠기 값에 미치는 영향에 대한 연구

Although the standard 2-CR network filter, one of the filters used for measuring surface roughness, is being used widely in the field of industry it possesses a weak point of causing Phase-distortion when the wavelength is passing through. Phase-corrected filter is used for eliminating these phase-distortion and the difference of phase characteristics between these two filters is thought to have considerable amount of effect on the surface roughness value. Moveover, the definition on this is as yet unclear. Therefore, the Rt and Rz value, obtained when the wavelength are passed through the standard and phase-corrected filters from the same random machine-processed surface, and its standard deviation are compared and experimented in this paper. Also, the ratio of relative bearing curve complying to the phase characteristics of these two filters are acquired. As a result, the use of phese-corrected filter is appropriate in experiments where the form of wavelength is important, and the standard deviation on the same experimented values appeared greater with when using the standard filter. The rate of relative bearing curve became greater as .lambda.$_{c}$, the cut-off value of filter, became smaller.r.

본 논문에서는 표면거칠기 측정에 있어 70% 이상을 차지하는 촉침식을 이용하여 필터의 cut-off치와 위상특성에 따른 표면거칠기 값의 변화와 필터의 선택에 따른 장점 및 문제점에 대하여 알아보고자 한다.