A Study on the Thickness Measurement of Thin Film by Ultrasonic Wave

초음파(超音波)를 이용(利用)한 박막(薄膜)두께 측정(測定)에 관(關)한 연구(硏究)

Recently, it is gradually raised necessity that thickness of thin film is measured accurately and managed in industrial circles and medical world. In this study, regarding to the thickness of film which is in opaque object and is beyond distance resolution capacity, thickness measurement was done by MEM-cepstrum analysis of received ultrasonic wave. In measurement results, film thickness which is beyond distance resolution capacity was measured accurately. And within thickness range that don't exist interference, thickness measurement by MEM-ceptrum analysis was impossible.