고감도 레이저 간섭계를 이용한 미소 진동 진폭의 정밀측정

Ultrasensitive laser interferometer for precision measurement of small vibration displacement

본 연구에서는 미소한 진동진폭의 정밀한 측정을 위해 비교적 광선정렬(opti- cal alignment)이 쉽고 광손실이 적으며 국소부위의 진동측정이 가능한 다중반사계를 Michelson간섭계에 도입하였다.미소 진동진폭의 정밀한 값을 결정하기 위해서는 간 섭신호를 측정하여 간섭무늬 보간법과 곡선 맞춤법을 이용하는 방법이 있다. 전자는 간단한 계산과 시간을 절약할 수 있는 반면 후자는 복잡한 계산으로 인해 많은 시간이 소요된다. 그러나 정밀계측장비의 교정에서와 같이 경우에 따라서는 많은 시간과 노 력이 소요되더라도 정밀한 측정결과를 얻어야할 필요가 있기 때문에 이들 두가지 방법 의 정밀도를 확인하기 위해 컴퓨터에 의한 모의실험을 수행하였다.

Small vibration displacements may be measured by optical interferometers, based on the Michelson method. The standard Michelson interferometer works well when the mirror displacements are relatively large compared to the optical wavelength. But it does not work for displacements less than approximately a quater of optical wavelength. Several multiple reflection laser interferometers, simply modified standard Michelson interferometer, have been developed to decrease the minimum detectable limits. Among these a relatively simple and easy multiple reflection system is used to measure the small vibration displacements. This multiple reflection system is constructed with a right angle prism and a convex lens. Therefore this system makes it possible to measure a vibration displacement of the small area on the vibrating structure. The fringe interpolation method and curve fitting method are used to determine accurately the small vibration displacements from the measured interference fringe patterns. Also computer simulation technique is used to check the accuracies of these method. According to the results of the computer simulation technique, the curve fitting method is more accurate than the fringe interpolation method. The optically measured results are in good agreement with those of the standard accelerometer with high accuracy and it is possible to measure the peak vibration displacement as small as 9.01nm using multiple reflection system and curve fitting method.