Influence of the environments on the movement precision of the guide table using externally pressurized porous air bearing

다공질 정압공기 베어링을 이용한 직진 테이블에 있어 주위환경이 움직임 정밀.정확도에 미치는 영향

Recently, the precision required by precision manufacturing and machinery related to electronics is within the domain of submicron that it is difficult to evaluate them by traditional measuring equipments and methods. Accordingly, precision of sub 0.1.mu.m super precise position-decision-apparatus and straight-guide air bearing have been researched and they are almost ready to be used. In utilizing straight-guide-table for super-precision-measurement which used externally pressurized porous air bearing as a way of externally pressurized air bearing, the high-precision-straight movement is the most crucial. In this study, the researcher conducted the experimental study with trial manufacture to see how the surrounding temperature and support condition influenced the selection and allocation of the machine composing element which is important to the high-precision-straight movement. The researcher finding showed that when the property of the rail part and support part of the semi-closed slider form is different, the heat generation of the working motor and surrounding temperature influence the high-precision-straight movement significantly and the researcher showed the influence of the condition of central load and eccentric load to the straight movement precision when the support stand of the straight-table was supported by numerical values.

본 연구에서는 직진테이블 시작품을 통해 주위환경에 의한 영향 중 주위온도 에 따른 움직임 정밀 정확도의 변화 및 지지조건이 움직임 정밀.정확도에 미치는 영향 에 대해 실험 연구하였다.