한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제20권2호
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- Pages.43-48
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- 1987
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
증착 입사각에 따른 금속박막의 물성 변화
The Change of Physical Properties of Thin Metal Film with than Evaporating Incident Angles
- Jin, Hui-Chang (Dep't of Materials Eng. HanYang Univ.) ;
- Jo, Hyeon-Chun (Dep't of Materials Eng. HanYang Univ.) ;
- Baek, Su-Hyeon (Dep't of Materials Eng. HanYang Univ.)
- 발행 : 1987.06.01
초록
Chromium and Aluminum films were deposited by evaporation technique in
키워드