대한전자공학회논문지 (Journal of the Korean Institute of Telematics and Electronics)
- 제24권6호
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- Pages.969-974
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- 1987
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- 1016-135X(pISSN)
contact 이온주입과 Metal 증착이 다결정 실리콘저항의 면저항에 미치는 영향
The Effect of Sheet Resistance of Polysilicon Resistor with Contact Implantation and Metal Deposition
초록
High value sheet resistance (Rs, 350 \ulcorner/ -80 K \ulcorner/ ) borom implanted polysilicon resistors were fabricated under process condition compatible with bipolar integrated circuits fabrication. This paper includes the effect of contact ion implantation on Rs and the effect of electron gun(e-gun) deosition vs. non e-gun evaporated metal contacts on the Rs. From results, we observed that the contact ion implanted samples showed higher Rs value than those without contact ion implantation. Also, it was shown that there is noticeable amount of Rs degradation for e-gun samples, while sputtered samples expressed little Rs degradation after PtSi was formed.
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