수정 진동자를 이용한 박막두께 감시 장치의 제작과 특성

Desgin Method of the Quartz Crystal Thickness Monitor and its Characteristics

This paper shows the design method and the experimental results of the thin film thickeness monitor. The thin film thickness monitor uses 6 MHz quartz crystal in sensor and cooling system for the fine operation. The thin film thickness are measured by the digital frequrency counter.