한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제18권3호
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- Pages.116-124
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- 1985
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
CVD에 의한 $SnO_2$ Film 제조시 증착조건이 Film의 증착속도 및 물리적 성질에 미치는 영향
Effects of Deposition Conditions on the Deposition rate and physical properties of $SnO_2$ film produced by CVD
- Lee, Dong-Yun (Department of Metallugical Engineering Pusan National University) ;
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Lee, Sang-Rae
(Department of Metallugical Engineering Pusan National University)
- 발행 : 1985.09.01
초록
Chemical vapor deposition of
키워드