Bulletin of the Korean Chemical Society

  • 제6권5호
  • /
  • Pages.304-308
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  • 1985
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  • 0253-2964(pISSN)
  • /
  • 1229-5949(eISSN)
대한화학회 (Korean Chemical Society)
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An Electron Microscopic Investigation of the Structure of Thin Film Tin Oxide Material

  • Jeon, Eok-Gui (Department of Chemistry, The University of Arizona) ;
  • Choy, Jin-Ho (Department of Chemistry, Seoul National University) ;
  • Choi, Q.-won (Department of Chemistry, Seoul National University) ;
  • Kim, Ha-Suck (Department of Chemistry, Seoul National University)
  • 발행 : 1985.10.20
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초록

Morphological structure of tin oxide thin films was examined by transmission electron microscopy. TEM samples were prepared by chemical etching in hydrogen fluoride solution: firstly floating for 2-3 minutes in acid solution, then suspending on water found to be useful for the preparation of TEM samples. Electron micrographs showed the size of grains of the tin oxide crystal was dependent upon the temperature of the film preparation. Dopant concentration and heating time also influence the grain size. The resistivity of tin oxide material was explained by grain size and grain boundaries in a limited temperature and dopant concentration ranges.

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참고문헌

  1. Ann. Physic. (Leipzig) v.30 G. Bauer
  2. J. Phys. Chem. Solids v.23 E. E. Kohnke
  3. Acta Cyrst. v.9 W. H. Baur
  4. Australian J. Appl. Sci. v.5 R. F. Aitchison
  5. J. Electrochem. Soc. v.120 J. A. Aboaf;V. C. Marcotte
  6. Vaccum v.3 L. Holland;G. Siddal
  7. J. Electrochem. Soc. v.112 W. R. Sinclair;F. G. Peters
  8. Solid State Electron. v.7 H. A. Klasens;H. Koelmans
  9. J. Appl. Phys. v.38 W. Spence
  10. J. Phys. Soc. Japan v.15 T. Arai
  11. J. Electrochem. Soc. v.123 Z. M. Jarzebski;J. P. Marton
  12. J. Appl. Phys. v.32 J. A. Marley;T. C. Macavoy
  13. Treatise on Solid State Chemistry v.3 N. B. Hannay
  14. Advan. Pyhs v.14 D. W. Pashley
  15. Electron Microscopy of Thin Crystals P. Hirsch;A. Howie;R. Nichoison;D. Pashley;M. Whelan
  16. Rev. Metall. v.52 R. Castaing
  17. Techniques for Electron Microscopy no.Chap. 10 R. Phillips;D. Kay(ed.)
  18. IEEE Transactions on Electron Devices v.28 no.10 M. M. Mandurah
  19. Ultramicroscopy v.8 L. R. Eyring
  20. J. Crystal Growth v.52 M. Shiojiri;C. Kaito;Y. Saito;K. Teranishi;S. Sekimoto
  21. J. American Ceramic Soc. v.58 H. Kim;H. A. Laitinen
  22. M. S. Thesis, Seoul National University H. K. Cha
  23. J. Appl. Phys. v.33 T. B. Reed;J. T. Roddy;A. N. Mariano
  24. J. Electrochem. Soc. v.123 A. F. Carroll;L. H. Slack
  25. U. S. Patent Office, 2564707 J. M. Mochel
  26. Transmission Electron Microscopy of Materials G. Thomas;M. J. Goringe
  27. Met. Review v.1 P. A. Jacquet
  28. Electrolytic and Chemical Polishing of Metals W. J. Tegart
  29. IEEE Transactions on Electron Devices v.28 no.10 M. M. Mandurah
  30. J. Electrochem. Soc. v.125 Y. Wada;S. Nishimatsu
  31. Appl. Phys. Lett. v.36 M. M. Mandurah;K. C. Saraswat;T. I. Kamins
  32. J. Appl. Phys. v.51 M. M. Mandurah;K. C. Saraswat;C. R. Helms
  33. Electron Microscopy of Thin Crystals P. Hirsch;A. Howie;R. Nichoison;D. Pashley;M. Whelan
  34. Japan. J. Appl. Phys. v.4 M. Nagasawa;S. Shionoya;S. Makishima
  35. Angew. Chem. Int. Ed. v.15 M. D. Briton
  36. Advances in Ceramics v.1 W. D. Kingery
  37. Treatise on Solid State Chemistry v.5 N. B. Hannay
  38. J. Electrochem. Soc. v.125 Y. Wada;S. Nishimatsu
  39. Acta Metall. v.5 K. Lucke;K. Detert
  40. J. Electrochem. Soc. v.121 E. Giani;R. Kelly
  41. Thin Solid Films v.3 I. Viscrian;V. Georgescu
  42. J. Phys. Soc. Japan v.13 K. Ishiguro;T. Sasaki;T. Arai;I. Imura
  43. J. Phys. Chem. Solid v.29 H. E. Matthews;E. E. Kohnke
  44. Solid State Commun. v.6 H. J. Van daal
  45. J. Electrochem. Soc. v.119 C. A. Vincent
  46. J. Appl. Phys. v.38 J. M. Fairfield;B. J. Masters
  47. Proceedings of the 3rd international Conference on Sintering and Related Phenomena Sintering and Related Phenomena G. G. Kuczynski(ed.)