Bulletin of the Korean Chemical Society

Korean Chemical Society (대한화학회)
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An Electron Microscopic Investigation of the Structure of Thin Film Tin Oxide Material

  • Jeon, Eok-Gui (Department of Chemistry, The University of Arizona) ;
  • Choy, Jin-Ho (Department of Chemistry, Seoul National University) ;
  • Choi, Q.-won (Department of Chemistry, Seoul National University) ;
  • Kim, Ha-Suck (Department of Chemistry, Seoul National University)
  • Published : 1985.10.20
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Abstract

Morphological structure of tin oxide thin films was examined by transmission electron microscopy. TEM samples were prepared by chemical etching in hydrogen fluoride solution: firstly floating for 2-3 minutes in acid solution, then suspending on water found to be useful for the preparation of TEM samples. Electron micrographs showed the size of grains of the tin oxide crystal was dependent upon the temperature of the film preparation. Dopant concentration and heating time also influence the grain size. The resistivity of tin oxide material was explained by grain size and grain boundaries in a limited temperature and dopant concentration ranges.

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