The Study on Characteristics of High Frequency Glow Discharge in Organic Vapor

유기 가스중 고주파 글로우가전 특성에 관한 연구

In this paper, the discharge phenomena of high frequency glow discharge in organic vapor are basically investigted to establish the growth mechanism and preparation technique for organic thin film. According to the increasing of discharge frequency, the discharge firing voltage(Vs) of organic vapor decreases. The dependence of discharge voltage(Vd) on gas pressure is generally in accord with Paschen's Law and Vd decreases as gas flow rate become larger, but increases as dischange current density become higher. And the values of Vd in organic vapor are generally higher than those of inorganic gas.