Journal of Industrial Technology (산업기술연구)
- Volume 4
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- Pages.37-41
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- 1984
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- 1229-9588(pISSN)
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- 1598-1371(eISSN)
The Effects of Deposition Variables on the CVD of SiC
증착변수가 SiC 화학증착에 미치는 영향
- So, Myoung-Gi (Dept. of Materials Eng., Kangweon Natl. Univ.) ;
- Nam, In-Tak (Dept. of Materials Eng., Kangweon Natl. Univ.)
- Published : 1984.10.31
Abstract
Deposits of SiC has been formed by a chemical vapor deposition technique involving the application of gaseous mixture of
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